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Transpector CPM Operating Manual
4.5.3 Dual-Capillary Sampling Option
The Dual-Capillary Sampling option reduces the pressure of a process atmosphere
ranging 300–1400 Torr to an intermediate pressure that is <10 Torr at the closed
ion source. (See Figure 4-6.) The exit orifice to the pumping line limits the flow to
the Turbo Molecular Pump and establishes the interstage pressure. The capillary
is inserted through the Swagelok
®
connection fitting. It is locked in place and
sealed by tightening the Swagelok nut with a re-usable ferrule.
Figure 4-6 Dual-Capillary sampling option (shown with calibration reference)
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