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Transpector CPM Operating Manual
10.4.1.2.3 Inlet Calibration
Defines the V5 Calibration valve.
If a standard calibration gas is installed, select Ar standard.
If a high mass tuning reference gas is installed, select FC5311 standard.
If V5 is not installed, select No Valve.
Figure 10-10 Inlet Calibration
10.4.2 Gauges pane
10.4.2.1 Process Gauge
The Transpector CPM includes an optional CDG (capacitance diaphragm gauge).
If the CDG is installed, enter its appropriate pressure range. Note that the scale
is in millitorr.
If the CDG is not installed, clear the check box.
Figure 10-11 Process gauge
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