Inficon Transpector CPM - Atmospheric Pressure (Capillary) Sampling

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Transpector CPM Operating Manual
1.5.3 Atmospheric Pressure (Capillary) Sampling
Table 1-3 Capillary sampling option
Process Pressure Range
(23
o
C ambient, no purge)
300 to 900 Torr (400 to 1199 mbar)
Capillary Size and Lengths 1/16 in. OD x 1.5 m SS capillary
1/16 in. OD x 3.0 m SS capillary
Process Gas Consumption 2.6 sccm @ 300 Torr (400 mbar)
17 sccm @ 760 Torr (1013 mbar)
30 sccm @ 900 Torr (1199 mbar)
Response Time for Composition
Changes (response to normal inert
gases)
Capillary Delay: t(1.5m) = 0.3 s
t(3.0m) = 1 s
Intermediate Volume Tau = 0.7 s
CPM Isolation time constant = 75 s