7–2
Transpector CPM Operating Manual
7.2.1 Toxic Material
Sensors, pumps, Hexblock components and connecting
tubing used in applications where toxic materials are
employed or generated are likely to carry residues of
these materials. Appropriate safety precautions must be
obeyed when handling contaminated sensors to assure
safety of maintenance personnel.
7.2.2 Radiation
Transpector CPM does not produce harmful radiation.
7.2.3 Electrical Voltages
The Transpector CPM does not present electrical hazards when enclosed and
grounded according to the specifications given in the installation instructions.
WARNING - Risk Of Electric Shock
The Transpector electronics and CPM controller modules
should never be operated with their covers removed.
Hazardous electrical voltages present a shock hazard.
Such operation should not be attempted, except by
qualified service personnel.
WARNING - Risk Of Electric Shock
Before any maintenance is performed, the CPM system
must be disconnected or isolated from its power source
(AC mains) and the Turbo Molecular Pump must be at
rest.