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Transpector CPM Operating Manual
2.7 CPM Foreline Pump Installation
The 24 V (dc) dry Foreline Pump has the following connections:
Electrical connection to the CPM controller
Foreline hose connection from the UHV Turbo Molecular Pump foreline block
Exhaust port connection—required for corrosive or toxic gas sampling. Refer
to appropriate standards such as
SEMI S6-0707E for exhaust gas guidelines.
Proper exhaust connections must be installed when
sampling toxic, corrosive or any hazardous gases to
protect the environment from lethal levels of gas.
If a customer-supplied foreline pump is used, it must
provide a continuous pressure below 10 Torr.
Figure 2-9 Two-stage foreline pump components
2.8 Software Installation
Refer to the FabGuard Explorer Operating Manual for information regarding
software installation.
Foreline
Connection
Exhaust Port
Foreline Power
Cable
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