Inficon Transpector CPM - Page 36

2–10
Transpector CPM Operating Manual
Figure 2-8 CPM cable connections
Heater Jacket
Foreline Pump
Htr
AC In
Transpector CPM Controlle
r
Forepump
Powe
r
CPM
Interface
CPM Sensor
600-1155-P5
15 9
Gnd
600-1154-PX
600-1480-PX
1, 3, 5 Or 10 m
Cable Bundle
600-1477-Gx
922-205-GX
Hex
Block
Inlet
CDG
600-1475-P1
600-1474-P1
600-1473-P1
600-1476-P1
Turbo
Molecula
r
Pump
Foreline Block
Turbo
Ctrl
Valve
Block
Pressure
Switch
Fan
Pirani
Transpector CPM
Cable Box
Cable Box (Bottom View)
IO
600-1472-P1 600-1473-P1 600-1476-P1 600-1485-P1 600-1486-P1 600-1474-P1
600-1475-P1
Ethernet
600-1130-PX