Inficon Transpector CPM - Changing Diaphragms in the Foreline Pump

7–6
Transpector CPM Operating Manual
7.6 Changing Diaphragms in the Foreline Pump
7.6.1 Replacement Interval
The foreline pump diaphragm disks, valve seals, valve disks, and O-rings must be
replaced every 8000 hours of operation.
7.6.2 Diaphragm kit PN 923-418-G1
Figure 7-1 Diaphragm kit contents
Valve
Disk
Valve
Seal
Thick
Thin
Diaphragm Disk
O-ring
O-ring
Diaphragm Disk
Valve
Seal
Valve
Disk
Thin
O-ring
Thick
O-ring