1–2
Transpector CPM Operating Manual
1.2 Purpose of Transpector CPM
Transpector CPM samples a representative fraction of a process environment and
directs the gas sample to a Residual Gas Analyzer (RGA). The CPM can detect
levels of impurities in process gases at sub-ppm levels.
1.2.1 Description of the Transpector CPM
Transpector CPM is comprised of:
FabGuard
®
or FabGuard Explorer™ software provides automatic or manual
control and status information. It includes a full array of basic residual gas
analyzer (RGA) features, including Spectrum or Selected Peaks scanning,
Leak Detection and Recipe Generation.
Quadrupole Sensor analyzes gases by: (1) ionizing the gas molecules,
(2) separating the ions by their mass-to-charge ratio, and (3) measuring the
quantity of ions at each mass. The sensor can indicate the partial pressures of
gases characteristic of processes occurring within a vacuum or other vessel,
and is used to investigate the nature of a process or to monitor process
conditions.
Electronics Module (Transpector
®
) controls the sensor. The electronics
module and quadrupole sensor are a matched set. The electronics module
attaches to and is supported by the sensor.
CPM Controller consolidates control functions into a single device. The CPM
controller works in conjunction with the Transpector electronics module to
control valve activation, heaters, pumps, and power to all elements of the
system.
Pumping System provides process sampling from 1.5 atmospheres to high
vacuum.
Inlet Valves, a HexBlock™ inlet provides several sampling ranges, a
calibration reference, and a process pressure gauge.
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