Inficon Transpector CPM - Purpose of Transpector CPM

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Transpector CPM Operating Manual
1.2 Purpose of Transpector CPM
Transpector CPM samples a representative fraction of a process environment and
directs the gas sample to a Residual Gas Analyzer (RGA). The CPM can detect
levels of impurities in process gases at sub-ppm levels.
1.2.1 Description of the Transpector CPM
Transpector CPM is comprised of:
 FabGuard
®
or FabGuard Explorer™ software provides automatic or manual
control and status information. It includes a full array of basic residual gas
analyzer (RGA) features, including Spectrum or Selected Peaks scanning,
Leak Detection and Recipe Generation.
 Quadrupole Sensor analyzes gases by: (1) ionizing the gas molecules,
(2) separating the ions by their mass-to-charge ratio, and (3) measuring the
quantity of ions at each mass. The sensor can indicate the partial pressures of
gases characteristic of processes occurring within a vacuum or other vessel,
and is used to investigate the nature of a process or to monitor process
conditions.
 Electronics Module (Transpector
®
) controls the sensor. The electronics
module and quadrupole sensor are a matched set. The electronics module
attaches to and is supported by the sensor.
 CPM Controller consolidates control functions into a single device. The CPM
controller works in conjunction with the Transpector electronics module to
control valve activation, heaters, pumps, and power to all elements of the
system.
 Pumping System provides process sampling from 1.5 atmospheres to high
vacuum.
 Inlet Valves, a HexBlock™ inlet provides several sampling ranges, a
calibration reference, and a process pressure gauge.