Inficon Transpector CPM - Exhaust Gas

1–12
Transpector CPM Operating Manual
Figure 1-2 Compressed air supply connection
The pressure range is 58–100 psi (gauge) (4–6.9 bar) [400–690 kPa].
Recommended setting is 75-80 psi (gauge) (5.17 to 5.52 bar) [517 kPa to
552 kPa].
WARNING
Nitrogen pressure must not exceed 100 psi (gauge)
(6.9 bar) [690 kPa].
CAUTION
Nitrogen pressure must be at least 58 psi (gauge)
(4 bar) [400 kPa].
1.9 Exhaust Gas
Exhausting gas from the Turbo Molecular Pump is required for corrosive
applications. With non-corrosive applications, exhaust the Turbo Molecular Pump
in accordance with the facility's requirements. The dry Foreline Pump has a
6.35 mm (1/4 in.) Swagelok
®
tube adapter for an exhaust fitting.
Dry Compressed Air
Dry nitrogen
58–100 psi (gauge)
58–100 psi (gauge)
Bearing Purge
Corrosive System Only
Recommended Setting
is 75-80 psi (gauge)