6–3
Transpector CPM Operating Manual
6.1.1.1 Hex Block Process Connections
6.1.2 Calibration Option
A single source of gas mixture will accomplish two calibration functions:
Mass scale calibration
Partial pressure reference levels
NOTE: Selection of the appropriate gas mixture components is dictated by the
mass range desired.
Test Mix 1 composition is listed in Table 6-2. The method of delivery is a flow
reference with a remote on/off valve (V5). The gas flow rate is calibrated at the
factory and is kept small (typically 1x10
-4
Torr-L/s) by a sintered leak. Flow through
the leak element is viscous, therefore the gas composition in the reservoir is not
altered by sampling. The pumping system does not allow other valves to be opened
with the calibration reference to ensure that no calibration mix enters the tool.
NOTE: Refer to the software operating manual for more information regarding
Mass Tuning. Results using FabGuard Explorer or FabGuard with this
calibration mixture may be different than shown above due to the
programming of the ionization probability and material factors.
Table 6-1 Hex block process connections
Types of connections Part Number
KF25 In-line connection 923-700-G1
KF40 In-line connection 923-701-G1
CF40 In-line connection 923-702-G1
KF25 90 degree elbow connection 923-703-G1
KF40 90 degree elbow connection 923-704-G1
CF40 90 degree elbow connection 923-705-G1
Table 6-2 Mix 1: Calibration mixture of selected impurities in argon
Component
(Composition)
Calibration Masses
Mix 1 H
2
(1%) 2
He (1%) 4
N
2
(1%) 28
Ar (Balance) 36, 38, 40
Kr (1%) 84
Xe (1%) 134, 136
To Next Page
Loading...