EasyManua.ls Logo

Inficon Transpector CPM - Page 17

Inficon Transpector CPM
190 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
1–6
Transpector CPM Operating Manual
Minimum Background
Pressure
1x10
-8
Torr
(1.3x10
-8
mbar)
Maximum Sensor and
Inlet Temperature
150°C
1
Ion source pressure reading @ low emission using total pressure lens
2
Total pressure accuracy @ low emission
3
Maximum ion source operating pressure @ low emission
4
2x10
-4
Torr in the ion source will produce about 1x10
-5
Torr in the quadrupole region
5
MDPP at the ion source with EM on and 1 s dwell time
6
Mass 40 contribution onto 41 AMU
7
Zero blast contribution onto 2 AMU
8
Minimal detectable concentration with Krypton in air @ a 1 s dwell time
9
For 1 Torr orifices and lower. Linearity @ low emission at 0.1 to 2 times the nominal orifice pressure
Table 1-1 General specifications (continued)
Mass Range (AMU) 1 – 100 1 – 200 1 – 300

Table of Contents