8–5
Transpector CPM Operating Manual
Electron Multiplier error Defective sensor, EM
shorted
Check sensor with Ohm
meter. See sensor pin-out
diagram
Fix or replace sensor
EM just replaced Verify that EM is plugged
into the HV pin properly
Electronics failure Return to INFICON for
repair
Temperature error Transpector CPM internal
ambient temp >70°C
Verify unit is installed
properly, ambient temp
<50°C
Verify that there are no heat
sources in local proximity
Verify that the internal fan is
providing adequate airflow
Electronics failure Return to INFICON for
repair
Overpressure Total Pressure Plate
current exceeded trip
threshold
Reduce pressure at the ion
source to less than 5E-4
Tor r
Total Pressure plate is
contaminated
Replace ion source
Process pressure too high
for sampling orifice
Reduce process pressure
Install proper orifice for
process pressure
Electrometer error Excessive current
(>2E-6 Amps)
Reduce Pressure at the ion
source
Reduce EM voltage
Electronics failure Return to INFICON for
repair.
Table 8-1 Symptom—Cause—Remedy Chart (continued)
SYMPTOM CAUSE REMEDY
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