Inficon Transpector CPM

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10–13

Transpector CPM Operating Manual

Selected Masses (Bins) mode allows data collection of specific masses.

Figure 10-21 What to Acquire—Selected Masses

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Table of Contents5
Getting Started12
General Safety Information12
Purpose of Transpector CPM13
Description of the Transpector CPM13
Using this Operating Manual14
How to Contact INFICON15
Returning Transpector CPM to INFICON15
Transpector CPM Performance Specifications16
General Specifications16
Hex Block Orifice Sampling Inlets18
Atmospheric Pressure (Capillary) Sampling19
Physical Requirements20
Physical Dimensions20
Weight21
Ventilation Requirements21
Electrical Power Requirements21
Required Supply Voltage21
Acceptable Supply Voltage Range21
Required Frequency21
Power Rating21
Fuse Rating22
Overvoltage Category22
Electrical Connections22
Nitrogen Purge Gas (Corrosive System Only)22
Exhaust Gas23
Air Pressure Requirements24
Required Air Pressure24
Air Pressure Range24
Moisture Content of Compressed Air Supply24
Air Pressure Connections24
Vacuum Requirements25
Required Vacuum25
Acceptable Range of Vacuum25
Environmental Requirements25
Use25
Altitude Range25
Maximum Humidity25
Pollution Degree25
Maximum Operating Temperature25
Minimum Operating Temperatures25
Clean Room Requirements26
Anti-Static Conditions26
Computer System Requirements26
Operating System26
Installation27
Installation Overview27
Transpector Electronics Module, Heat Guard, and Cable Box Installation28
Attach Transpector Electronics Module28
Attach Heat Guard29
Attach Cable Box30
Sniffer Installation31
Mounting the Pumping System31
Installing the Support Kit32
Atmospheric Support Frame33
CPM Controller Installation33
Transpector Cable Box Connections35
CPM Foreline Pump Installation37
Software Installation37
Connecting Transpector CPM38
Introduction38
General Networking Information38
IP Addresses38
Subnetworking39
Transpector CPM IP Address39
Using the INFICON Mass Spectrometer Search Utility to Change the Transpector CPM IP Address40
Change IP Address41
Launch Web UI42
Find Device42
Show Settings42
Connecting Transpector CPM43
Connecting a Single Transpector CPM43
Single Transpector CPM Direct Connection Installation43
Installing a Single Transpector CPM on an Existing Local Network43
Installing Multiple Transpector CPM Sensors44
Installing Multiple Transpector CPM Directly to a Host Computer44
Installing Multiple Transpector CPM on an Existing Local Network44
Changing the Computer IP Address45
Windows 745
How the CPM System Works49
CPM Components49
Theory of Operation50
Instrument Overview50
Input/Output (Aux I/O)50
CPM Aux I/O Connector51
Two Digital Inputs51
One Status Relay Output51
One Analog Input52
Ultra-High Vacuum System52
Foreline Subsystem53
Heater(S) Subsystem53
CPM Controller Subsystem53
Solenoid Valves54
Sensor and Transpector Electronics Module Subsystem55
Application56
Sample Inlet Systems and Examples of Use57
Inlet System57
High Pressure Sampling: Orifice Bypass (V4)60
Dual-Capillary Sampling Option61
Advice and Tips62
Achieving Good Base Pressure in the CPM62
Avoiding Trapped Gas When Sampling Valves Are Closed62
Theory and Application Guide63
Theory of Operation63
Sensors63
The Ion Source64
The Quadrupole Mass Filter66
Scanning Characteristics68
The Zero Blast69
The Ion Detector70
The Electron Multiplier (EM) Detector70
The Continuous Dynode Electron Multiplier/Faraday Cup Detector71
How to Interpret the Result73
Qualitative Interpretation of Mass Spectra73
Ionization Process75
Isotope Ratios77
Electron Energy Effects79
A Qualitative Interpretation Guide81
Dry Etching Chemistries84
Tungsten CVD86
Copper MOCVD87
Quantitative Interpretation of Mass Spectra88
(Calculating Partial Pressures)88
Additional Information for Interpreting Mass Spectra94
Ion Source Characteristics94
Scanning Characteristics95
Fragmentation Factors96
Operation97
Hexblock97
Hexblock Inlet98
Hex Block Process Connections99
Calibration Option99
High Mass FC5311 Tuning Reference100
Process Gauge (CDG)101
Heaters101
Pumping System101
Foreline Pump102
Foreline Pirani Gauge102
Turbo Molecular Pump102
Turbo Molecular Pump Status103
Nitrogen Purge Valve for the Turbo Molecular Pump on Corrosive Pumping103
Systems103
Filament Control103
Interlock103
Total Pressure Calibration103
Filament Lifetime104
Pneumatic Digital Pressure Switch and Pressure Gauge107
Setup Procedure107
How to Test for Proper Settings110
How to Lock and Unlock the Settings110
Maintenance111
Introduction111
Safety Considerations111
Toxic Material112
Radiation112
Electrical Voltages112
Maintenance Procedures113
Bakeout of Quadrupole113
Spare Heating Jacket113
General Instructions for All Repair Procedures114
Required Tools, Materials, or Parts115
Tools for Replacing the Filament Kit115
Tools for Replacing the Ion Source115
Tools for Replacing the Electron Multiplier115
Parts Required for Maintenance115
Changing Diaphragms in the Foreline Pump116
Replacement Interval116
Diaphragm Kit PN 923-418-G1116
Procedure117
Transpector Sensor Maintenance126
How to Determine if a Filament Kit Replacement Is Required127
Transpector Sensor Filament Replacement128
Transpector Sensor Ion Source Replacement130
Electron Multiplier Replacement133
Hexblock Inlet Maintenance139
Valve and Orifice Replacement139
Diagnosing Problems142
Introduction142
Communication Problems142
CPM Symptom-Cause-Remedy Chart143
If You Cannot Resolve Your Problem150
Event Log Files150
Recommended Parts List151
Ordering Information151
CPM Consumable Parts151
Preventative Maintenance Parts153
Replacement Spare Parts153
Fabguard Explorer Operation154
Operation (Fabguard Explorer)154
Introduction154
Connecting to Transpector CPM155
RGA Configuration-CPM Tab157
Valves and Orifices Pane158
Inlet LP158
Inlet HP158
Inlet HC158
Inlet Bypass158
Inlet Calibration159
Gauges Pane159
Process Gauge159
Bypass Delay - Interlock between V2 and V4160
CPM Configuration Monitor161
CPM Sensor Acquisition Defaults165
What to Acquire (Rgas)165
Acquisition Modes165
Spectrum Mode Acquisition Parameters167
Selected Masses Mode168
Existing Masses169
Adding Masses170
How to Acquire (CPM)173
Ionizer Presets174
Start Parameters174
Start Mode Type174
Data Threshold175
Emission175
Multiplier175
Relay 1175
Stop Parameters176
Stop Mode Type176
Data Threshold176
Maximum Duration177
Emission177
Multiplier177
Relay 1178
Dwell178
Dwell Mode179
Dwell Time179
Delay179
Delay Mode179
Time between Scans180
Stabilization Time180
Correction180
Baseline180
Peak Lock181
Inlet181
Close after182
Duty Cycle182
Heater182
Off after182

Inficon Transpector CPM - Page 166

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