Inficon Transpector CPM User Manual

5–20
Transpector CPM Operating Manual
.
Table 5-4 Spectrum interpretation guide
AMU # Chemical Symbol Sources
1 H water F or hydrogen F
2 H
2
, D hydrogen, deuterium (
2
H)
3 HD,
3
H hydrogen-deuterium, tritium (
3
H)
4 He helium
5 No known elements
6 C Doubly Ionized
12
C (Rare)
7 NDI
14
N (Rare)
8 ODI
16
O (Rare)
9 No known elements
10 Ne,
10
BDI
20
Ne (Rare), BF
3
, BCl
3
11 Ne,
11
BDI
22
Ne (Rare),
11
BF
3
, BCl
3
12 C carbon, carbon monoxide F,
carbon dioxide F
13 CH,
13
C methane F, carbon isotope
14 N, CH
2
nitrogen, methane F or Note 1
15 CH
3
methane F or Note 1
16 O, CH
4
, NH
2
oxygen or carbon monoxide F, ammonia
17 OH, NH
3
water F, ammonia F
18 H
2
O water
19 F fluorine or freon F
20 Ar
2+
, Ne, HF argon Dl, neon, hydrofluoric acid
21
22
22
Ne, CO
2
neon, DI CO
2
23
24 C
2
See Note 1
25 C
2
H See Note 1
26 C
2
H
2
CN See Note 1, hydrogen cyanide F
27 C
2
H
3
, Al, HCN See Note 1, aluminum, hydrogen cyanide
28 N
2
, CO, C
2
H
4
, Si nitrogen, carbon monoxide, ethylene P,
silicon

Inficon Transpector CPM Specifications

General

Brand	Inficon
Model	Transpector CPM
Category	Industrial Equipment
Language	English