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10   Advanced Usage
Vision System FH/FHV/FZ5 Series User’s Manual (Z365)
10-9  Positioning workpieces for stage and
robot applications [Alignment Function]
10
10-9-2  Execution of Calibration
 Vision Master Calibration (Homing operation selection is Enabled.)
Executing Calibration
External device PLC
FH/FZ5
Outputs data
1:  Moves to the axis 
position when 
Calibration is started.
Response that 
movement is completed.
Repeats processing within 
this frame until calibration 
complete flag is ON.
2:  Clear the measurement 
results.
Response that clear 
processing is completed.
3: Measurement Command
3.1: Measurement
Moves only each axis of next axis 
movement amount when calibration 
complete flag is OFF.
4:  Moves only each axis of 
next axis movement 
amount
Response that 
movement is completed.
• Next axis movement amount 
(by each axis of external device)
• Calibration complete flag