Prevac MG15 - Vacuum Gauges Possible Statuses; Emission Control Options

MULTI GAUGE CONTROLLER COMMUNICATION
Table 6.18 – continued from previous page
Value Description
4 Pressure too high (out of vacuum gauge range)
5 Anode voltage failure
6 Bias voltage failure
7 Relector voltage failure
8 Degas failure
9 Gauge not calibrated
10 No emission
11 Offset calibration
12 Low vacuum (out of vacuum gauge range)
13 High vacuum (out of vacuum gauge range)
14 There is no meaningful vacuum value to display
15 No hardware for passive vacuum gauge
16 Passive gauge EEPROM failure
17 Filament failure
18 Degassing
19 Sensor break for active vacuum gauge
Table 6.18: Vacuum gauges possible statuses
Value Description
EMISSION CONTROL OPTIONS
0 Manual
1 Setpoint 1
2 Setpoint 2
3 Setpoint 3
4 Setpoint 4
5 Setpoint 5
6 Setpoint 6
7 Setpoint 7
8 Setpoint 8
9 Setpoint 9
10 Setpoint 10
11 Digital input 1
12 Digital input 2
13 Digital input 3
14 Digital input 4
Table 6.19: Emission control options
Value Description
GAS TYPE OPTIONS
0 O2
1 He
2 Ne
3 Ar
continued on next page
User manual rev. 03 Page 107