COMMUNICATION MULTI GAUGE CONTROLLER
6.4.8 TABLE OF MODBUS VARIABLES - MAP OF REGISTERS
NAME OF VARIABLE ADDRESS TYPE KIND RANGE [UNIT]
BASIC INFORMATION ABOUT VACUUM CHANNELS
Channel 1 – vacuum value 0 R FLOAT [mbar] / [nA] (*)
Channel 1 – status 2 R UINT8 see tab. 6.18
Channel 2 – vacuum value 3 R FLOAT [mbar] / [nA] (*)
Channel 2 – status 5 R UINT8 see tab. 6.18
Channel 3 – vacuum value 6 R FLOAT [mbar] / [nA] (*)
Channel 3 – status 8 R UINT8 see tab. 6.18
Channel 4 – vacuum value 9 R FLOAT [mbar]
Channel 4 – status 11 R UINT8 see tab. 6.18
Channel 5 – vacuum value 12 R FLOAT [mbar]
Channel 5 – status 14 R UINT8 see tab. 6.18
Channel 6 – vacuum value 15 R FLOAT [mbar]
Channel 6 – status 17 R UINT8 see tab. 6.18
Channel 7 – vacuum value 18 R FLOAT [mbar]
Channel 7 – status 20 R UINT8 see tab. 6.18
BASIC INFORMATION ABOUT SETPOINTS
Setpoints state 21 R UINT16 0 .. 1023
Setpoint 1 LOW – vacuum value 22 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 1 HIGH – vacuum value 24 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 2 LOW – vacuum value 26 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 2 HIGH – vacuum value 28 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 3 LOW – vacuum value 30 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 3 HIGH – vacuum value 32 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 4 LOW – vacuum value 34 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 4 HIGH – vacuum value 36 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 5 LOW – vacuum value 38 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 5 HIGH – vacuum value 40 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 6 LOW – vacuum value 42 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 6 HIGH – vacuum value 44 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 7 LOW – vacuum value 46 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 7 HIGH – vacuum value 48 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 8 LOW – vacuum value 50 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 8 HIGH – vacuum value 52 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 9 LOW – vacuum value 54 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 9 HIGH – vacuum value 56 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 10 LOW – vacuum value 58 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 10 HIGH – vacuum value 60 R/W FLOAT
..
[mbar] / [nA] (*)
Setpoint 1 source 62 R/W UINT8 see tab. 6.21
Setpoint 2 source 63 R/W UINT8 see tab. 6.21
Setpoint 3 source 64 R/W UINT8 see tab. 6.21
Setpoint 4 source 65 R/W UINT8 see tab. 6.21
Setpoint 5 source 66 R/W UINT8 see tab. 6.21
(*) - the unit depends on the Flux Monitor ON/OFF option
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Page 100 User manual rev. 03