49
Checking Measurement Results
Pin contact
Result Indicates FAIL if there was a contact error or PASS if there was no
contact error.
Error count Indicates the number of probes exhibiting a contact error.
Potential meas. reliability
Consistency Indicates PASS if the relative magnitudes of the potential
measurement results suggest the proper potential gradient near the
center. Indicates FAIL if the proper relationship is not observed, in
which case operation will not proceed to analysis.
Error rate [%] Indicates how many potential measurement results generated
measurement errors as a percentage of all potential measurement
results. (This value is not the same as the number of probes
generating contact errors.)
Variation [%] If multiple potential measurements were performed, indicates the
amount of variation among potential results (i.e., the coefcient of
variability) as a percentage.
Analysis results
Iteration number Indicates the number of iterative analyses performed, calculated as
the number of iterations divided by the limit iteration number.
Coincidence Indicates the extent to which the measured potential distribution
matches the calculated potential distribution. A value of 1.000
indicates a perfect match, while smaller values indicate a less perfect
match. (Negative values are possible.)
History Displays the measurement history. New results are appended to
the history as they are obtained. When analysis is performed, the
history displays the composite layer resistivity, interface resistance,
and temperature. If the operating mode is set to [Meas.], only the
temperature [°C] will be shown.
3
Basic Measurement
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