55
Choosing the Unit for Composite Layer Resistance
4.4 Choosing the Unit for Composite Layer
Resistance
You can set the unit used to measure composite layer resistance to either Volume resistivity [
Ω
cm]
or Surface resistivity [
Ω
cm
^2
].
1
2
3
4
1
Choose [Settings].
2
Choose [Measurement].
3
Choose one of the following settings for [Composite layer unit]:
Volume resistivity [
Ω
cm]
Output the composite layer resistivity as volume resistivity [
Ω
cm].
Use this setting when calculating material properties.
Surface resistivity [
Ω
cm
^2
] Output the composite layer resistivity as surface resistivity [
Ω
cm
2
].
Use this setting when comparing the interface resistance [
Ω
cm
2
] and
resistance.
Comparing the interface resistance [
Ω
cm
2
] and resistance (p. 99, p. 100)
Formula:
Composite layer volume resistivity [
Ω
cm] × composite layer thickness [cm]
4
Click [Apply] or [OK] to accept the settings. (Clicking [OK] will cause you to return to the
main screen.)
Both the composite layer volume resistivity [
Ω
cm] and surface resistivity [
Ω
cm
2
] will be
output to the analysis results le.
4
Customizing Measurement Conditions