Inficon Transpector CPM - Page 120

7–10
Transpector CPM Operating Manual
7 Separate the diaphragm plate from the head cover. (See Figure 7-7.)
NOTE: Take note of the orientation of the valves in the head cover and
diaphragm plate. They must be reassembled in exactly the same
orientation.
Figure 7-7 Diaphragm plate separated from head cover
Valve
Seal
Valve
Disk
Head
Cover
Diaphragm
Plate
Thick
O-ring