Inficon Transpector CPM - Page 134

7–24
Transpector CPM Operating Manual
3 Using the 2.0 x 75 mm hex driver, unscrew three screws (D; one is hidden in
the figure) holding the sensor assembly to the feedthrough. Gently remove the
sensor assembly from the feedthrough. (See Figure 7-24.)
Figure 7-24 Removing the sensor assembly
D