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Inficon Transpector CPM User Manual

Inficon Transpector CPM
190 pages
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8–7
Transpector CPM Operating Manual
Filament current error Insufficient vacuum Verify pressure is less than
5E-4 Torr at the ion source
Filament broken Verify integrity of filament
Filament shorted Verify that filament is not
shorted to ground
Cable box not fully seated
on Transpector electronics
module
Ensure Cable box is fully
seated on Transpector
electronics module
Focus error Unable to start or maintain
focus voltage
Reset Electronics module
Return electronics module
to INFICON for repair
No spectra Emission is OFF Turn Emission ON
EM is ON, when operating Turn EM OFF
Contaminated sensor Degas, or service sensor
Replace sensor
Electronics Failure Return to INFICON for
repair
Pressure too low for FC Use EM detector
EM voltage too low Increase voltage
Transpector CPM
electronics module not fully
engaged on sensor
Make sure that the
Transpector CPM
electronics module is
pushed completely on
sensor
Mass calibration Adjust mass calibration
Table 8-1 SymptomCauseRemedy Chart (continued)
SYMPTOM CAUSE REMEDY

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Inficon Transpector CPM Specifications

General IconGeneral
BrandInficon
ModelTranspector CPM
CategoryIndustrial Equipment
LanguageEnglish