Inficon Transpector CPM - Page 149

8–8
Transpector CPM Operating Manual
Poor
sensitivity
Sensor contaminated Degas sensor
Bake-out sensor
Replace ion source
Ion source pressure too low Increase process pressure,
if possible
Verify orifice is not blocked
and replace orifice if
necessary
Mass calibration
(resolution)
Adjust Mass Calibration,
increase peak width
Sensor operating
parameters set wrong
Check settings of: electron
energy, ion energy, focus
emission current
Improper calibration Ensure that the total
pressure gauge used for
sensitivity calibration was
properly calibrated
Electronics failure Return to INFICON for
repair
EM has low gain Replace sensor or EM
Poor peak shape Sensor contaminated Degas sensor
Bake-out sensor
Service sensor
Ion source pressure too
high
Verify pressure is less than
5E-4 Torr at the ion source
Mass calibration required Perform mass calibration
Electronics failure Return to INFICON for
repair
Table 8-1 Symptom—Cause—Remedy Chart (continued)
SYMPTOM CAUSE REMEDY