e
Cleaning the Vacuum Suction Port ............................................................................................... 3-10
Cleaning the Anti-Roll Rake ............................................................................................................... 3-11
Disassembling/Cleaning the Anti-Roll Rake ................................................................................. 3-11
Cleaning the Object Holder ................................................................................................................ 3-11
Cleaning the Window Gasket ............................................................................................................. 3-11
Replacing the Ozone Lamp ................................................................................................................ 3-11
Cleaning the Air Intake Grille .............................................................................................................. 3-12
Replacement of the Brine Solution (auxiliary cooling fluid) ................................................................ 3-12
Chapter 4 Troubleshooting
Troubleshooting ............................................................................................ 4-1
Before Suspecting a Trouble ~ Instrument Conditions and Remedial Actions ..................................... 4-1
When Error/Alarm/Other Message Screens Appear ............................................................................ 4-4
Error Codes Displayed during System Operation ................................................................................ 4-5
Glossary of Terms ......................................................................................... 4-7
Explanation of Terms ............................................................................................................................ 4-7
Decontamination Statement
Warranty Period and Repair
Warranty Period and Repair
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