HP 4062UX - User Manual

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HP 4062UX Semiconductor Process Control System

HP 4062F Semiconductor Parametric Test System

Installation Manual

ABCDE

HP Part No. 04062-90240

Printed in Japan October 1994

Edition 1

E1094

Main Page

Table of Contents7
General Information15
Introduction15
System Installation Flow Diagram15
Installation Sequence16
Arranged Installation Sequences for HP 4062UX/F16
Required Equipment17
Utility Software17
Abbreviations17
System Controller Installation19
Unpacking20
Line Voltage Switch and Line Fuse20
HP 9000 Series 300 Hardware Installation21
Backplane Expander21
Random Access Memory (RAM)21
HP-IB Interface Cards22
HP-IB Interface Settings22
HP-IB Interface Card Switch Settings22
Computers)22
ID Module23
HP-IB Interface Card Switch Settings23
Verifying Installed Accessories24
Connecting the ID Module in the HP-HIL Interface24
HP 9000 Series 700 Hardware Installation25
HP-IB Interface Cards26
HP E2071B HP-IB Interface Card Switches26
HP-IB Interface Supported for Series 700 Computers26
ID Module27
Connecting the ID Module in the HP-HIL Interface27
Rack Mounting Instructions28
Controller and Backplane Expander Installation Procedure (Option 701 or 702)29
Controller and Bus Expander Installation Procedure (Option 703 or 704)29
Rack Mounting the Controller and Backplane Expander30
Installing Controller (Option 705 or 706)31
Rack Mounting the Controller (Option 705 and 706)31
Mass Storage Unit32
Mass Storage Installation Procedure32
Rack Mounting the Mass Storage Unit33
Switching Matrix Installation35
Introduction35
HP 4085B/F (48-Pin) SWM Installation35
Unpacking35
Installing Additional Pin Boards36
Installing the SWM on a Wafer Prober38
Automatic Wafer Probers38
Manual and Small Automatic Wafer Probers38
Connecting Test Fixtures40
HP 4089B (96-Pin) SWM Installation (HP 4062UX Only)42
Unpacking42
Installing Additional Pin Boards42
Installing a Port Expander43
System Installation47
Introduction47
Installing the System Cabinet47
Stabilizing the System Cabinet48
Installing Power Cables48
When an Emergency O Unit Is Furnished49
Maximum Current for PDU49
When an Emergency O Unit Is NOT Furnished51
Installing Power Cables for each Instrument53
Changing the Line Voltage54
Fuse54
Installation of HP 4142B DC Subsystem (DCS)55
Installing the Customer's HP 4142B55
Installation Preparation55
Contents of Rack Mount Kit for the HP 4142B55
Installing the HP 4142B56
Attaching Rack Flanges to the HP 4142B56
HP 4142B DCS Settings57
Installation of HP 4280A Capacitance Measurement Subsystem (CMU)58
Installing the Customer's HP 4280A58
Installation Preparation58
Contents of Rack Mount Kit for the HP 4280A58
Installing the HP 4280A59
Attaching Rack Flanges to the HP 4280A59
Installing the HP 4280A60
HP 4280A CMU Settings61
Installation of HP 4284A Capacitance Measurement Subsystem (CMU84)62
Installing the Customer's HP 4284A62
Installation Preparation62
Contents of Rack Mount Kit for the HP 4284A62
Attaching Rack Flanges for HP 4284A63
Installing the HP 4284A64
HP 4284A CMU84 Settings64
Installation of HP 8110A Pulse Source Subsystem (PSS) (HP 4062F Only)65
Installing the Customer's HP 8110A65
Installation Preparation66
Contents of Rack Mount Kit for the HP 8110A66
Installing the HP 8110A67
Attaching Rack Flanges to HP 8110A67
Trigger Cable Connections of One HP 8110A68
Pulse Adder/Splitters Fixed on the Support Rail71
HP-IB Cables and Addresses72
HP-IB Addresses and Connections of the Rack Mounted Instruments72
Connections between the Controller and the System Instruments73
Connections of the HP-IB Cables74
Connections of the HP-IB Cables with Controller74
HP-IB Address and Connection of the Wafer Prober76
Installing Signal Cables77
When Your System Is HP 4062UX77
Connecting the CMU to the SWM79
Connecting the CMU84 to the SWM80
When Your System Is HP 4062F82
Fastening the Interconnection Cables with Cable Ties82
Connecting the HP 4084B SWC to the HP 4085F SWM83
Connecting the HP 4142B DCS to the HP 4085F SWM84
Connecting the HP 4280A CMU to the HP 4085F SWM85
Connecting the HP 4284A CMU84 to the HP 4085F SWM86
Connections between Output Terminals of the HP 8110A and HF Ports88
Removing System Instruments89
Testing each Instrument90
Testing Emergency O Unit and Power Distribution Unit (PDU)90
Testing Power Distribution Unit (PDU) (HP 4062UX Only)91
Testing each System Instrument92
Cleaning92
Software Installation Introduction93
Installing the HP 4062UX/F System Software94
Installing HP-UX and Other Application Software96
Required Swap Size and Memory for Series 300 Computers96
Required Swap Size and Memory for Series 700 Computers96
Installing and Customizing Your System98
Computers104
Installing and Customizing HP IMA106
Installing HP IMA/UX106
Customizing for HP IMA/UX106
Usr/Lib/Rmbrc or $Home/.Rmbrc106
Usr/Pcs/Etc/Xinitcolor107
Usr/Pcs/Etc/Codeword107
Usr/Pcs/Etc/Perconfig107
Creating a New User Account108
Customizing the Wafer Prober111
System Veri Cation113
Verifying the System con Guration with START Program114
Verifying the System con Guration with START.F Program116
System Performance Veri Cation for HP 4062UX117
Running the PV4062119
PV4062 Menu Page (HP 4062UX)119
The 4062UX W/O DVM120
Procedure121
Calibration Module Menu Page for 48-Pin SWM System122
Test Lead Connections for OPEN Correction123
Test Lead Connections for SHORT Correction124
PV Test Results Data Entry Page125
Relay Test Results Page for 48-Pin SWM127
Relay Test Results Page for 96-Pin SWM127
SMU Test Results Page128
VS Test Results Page128
VM Test Results Page129
AFU Test Results Page129
CMS C-G Test Results Page for 48-Pin SWM130
CMS C-G Test Results Page for 96-Pin SWM130
CMS Bias Test Results Page for HP 4280A131
CMU84 C-G Test Results Page for HP 4284A131
CMU84 Bias Test Results Page for HP 4284A132
DC Leak Test Results Page132
Displaying and Printing Test Results133
Displaying PV Test Results133
Printing PV Test Results133
An Example Page of View Result (CRT)133
An Example Page of View Result (Printer)135
System Performance Veri Cation for HP 4062F136
Running PV4062.F138
PV4062.F Menu Page (HP 4062F)138
4062F DC W/O DVM" Test139
Required Equipment139
Test Procedure140
4062F DC W/O DVM Test Startup Page140
Calibration Module Menu Page141
PV Test Results Data Entry Page144
Relay Test Results Page145
SMU Test Results Page146
VS Test Results Page147
VM Test Results Page147
AFU Test Results Page148
CMS C-G Test Results Page for HP 4280A149
CMS Bias Test Results Page for HP 4280A149
CMU84 C-G Test Results Page for HP 4284A150
CMU84 Bias Test Results Page for HP 4284A150
DC Leak Test Results Page151
4062F AC" Test152
Required Equipment152
Preparation153
Test Procedure154
Displaying and Printing Test Results157
Displaying PV Test Results157
Example Page of View Result (CRT)157
Printing PV Test Results158
An Example Page of View Result (Printer)159
Updating the System Software161
Introduction161
Updating for HP 4062UX/F161
Con Guring the System Printer for PV4062/PV4062.F163
Installation Problems You May Encounter169
Errors During the START/START.F Program169
For HP 4062UX/F System169
START ERROR 0 : Not Authorized to Use the Software169
START ERROR 90 : SYSCONFIG le Not Found169
START ERROR 300 : PCS SESSION ID Not de Ned170
START ERROR 310 : Group 'Pcs' Not Registered170
Not Found170
START ERROR 450 : Fatal Error in Pcsstart Command171
Pcsstart:error in SYSCONFIG: Invalid Select Code 29171
System con Guration Error172
Errors During the PV4062/PV4062.F Program172
Error Occurs While Test Infomation of File Is Being Stored172

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HP 4062UX Specifications

General

Brand	HP
Model	4062UX
Category	Control Systems
Language	English

HP 4062UX - User Manual

Table of Contents

HP 4062UX Specifications