1
General Information
Introduction
This manual provides the pro cedures and information necessary to install and verify b oth
the HP 4062UX Semiconductor Pro cess Control System and the HP 4062F Semiconductor
Parametric Test System.
This chapter covers the installation sequence, required reference material, and equipment
required to install the HP 4062UX/F. Chapter 2 covers system controller installation. Chapter
3covers switching matrix installation. Chapter 4 explains howto integrate the system
controller, switching matrix, and cabinet-mounted instruments into a system. Chapter 5
covers software installation and customization. Finally,chapter 6 provides instructions for
verifying proper system op eration.
Use this manual after the
Pre-instal lation Manual
, which contains site preparation
information for Hewlett-Packard Customer Engineers who p erform the installation. Figure 1-1
shows a ow diagram of the installation sequence.
Figure 1-1. System Installation Flow Diagram
General Information 1-1
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