HP 4062UX - Customizing the Wafer Prober

Customizing the Wafer Prober
Use this section to customize the wafer prob er. If your HP 4062UX/F system is not used with
an automatic or semiautomatic wafer prob er, skip this section and go to the next chapter.
The HP 4062 supports the following wafer probers:
Electroglas 1034X, 2001X, 2010X, 3001X, 4060X, and 4080X
TSK A-PM-3000A, -6000A, -7000A, -60A, -80A, and -90A
Tokyo Electron 4000A, 4400A, 19S, 20S, 80S, 78S, and 80W
Micronics Japan SP-900B, -1000B, and -1100B
Note
Your wafer prober must b e congured for the HP 4062 system. Contact your
wafer prob er manufacturer for details on the HP 4062 conguration.
The HP-IB primary address of the wafer prober registered in the SYSCONFIG le must be
the same as the HP-IB primary address of the wafer prober. Conrm the HP-IB primary
address of your wafer prober. The default select co de (for series 300 computers) or logical unit
number (for series 700 computers) set in the /usr/p cs/etc/SYSCONFIG le is 25.
To show and mo dify the SYSCONFIG le, use the following pro cedure:
1. Boot the HP-UX system.
2. Log in as a sup eruser.
3. Start HP BASIC/UX byentering rmb .
4. Load the SYSCONFIG le, which is stored in the /usr/p cs/etc directory, using GET
command as follows:
GET "/usr/pcs/etc/SYSCONFIG" 4
Return
5
5. Start the BASIC EDITor byentering EDIT .
6. Mo dify the contents of the SYSCONFIG le, if needed.
7. If you mo dify the le, save the SYSCONFIG le as follows:
RE-SAVE "/usr/pcs/etc/SYSCONFIG" 4
Return
5
Note
If the registered address of the wafer prober is the same as the address of
another device, mo dify the address of the w
afer prob er.
Software Installation 5-19