Inficon Transpector CPM User Manual

7–22
Transpector CPM Operating Manual
4 The ion source can now be removed by lifting it off the quadrupole assembly.
Install a new ion source by reversing the above steps. (See Figure 7-22.)
Figure 7-22 Ion Source and quadrupole assembly
5 Using an ohm meter, check that the filament is not shorted to ground or to any
of the ion source plates and that the two filament leads show a filament
resistance of approximately 1 at the feed-through (approximately 0.5  at the
lead connectors).

Inficon Transpector CPM Specifications

General

Brand	Inficon
Model	Transpector CPM
Category	Industrial Equipment
Language	English