4–10
Transpector CPM Operating Manual
When both volume and high vacuum pump speed are constant, the orifice hole size
determines the pressure at the sensor. Orifices are available in various sizes to
cover several pressure ranges. Table 4-5 and Table 4-6 show different orifices for
low and high pressure range application. Figure 4-5 shows pressure ranges for
sampling which will assist in choosing the proper orifice for the application.
Table 4-5 Hex block orifices (V1 for low pressure, typically background)
HexBlock Orifices Part Number
10 mTorr orifice 923-706-G6
15 mTorr orifice 923-706-G8
100 mTorr orifice 923-706-G5
360 mTorr orifice 923-706-G7
1 Torr orifice 923-706-G4
3 Torr orifice 923-706-G9
10 Torr orifice 923-706-G3
Table 4-6 Hex Block orifices, sniffers and capillaries
(V2 for high pressure, typically process pressure)
Size of Orifices, Sniffers and Capillaries Part Number
10 mTorr orifice 923-706-G6
15 mTorr orifice 923-706-G8
100 mTorr orifice 923-706-G5
360 mTorr orifice 923-706-G7
1 Torr orifice 923-706-G4
3 Torr orifice 923-706-G9
10 Torr orifice 923-706-G3
30 Torr orifice
(requires high pressure by-pass)
923-706-G10
7 Torr sniffer
(requires high pressure by-pass, 30.5 cm length)
923-707-G3
10 Torr sniffer
(requires high pressure by-pass, 5 cm length)
923-707-G1
100 Torr sniffer
(requires high pressure by-pass, 5 cm length)
923-707-G2