Automatic Wafer Probers
Before you can install the SWM and HP 16377A/B Personality Board onto the wafer prober,
mounting hardware|hinge, head plate, and so on|must be fabricated. For this purpose, the
dimensions and other mechanical sp ecications for the SWM and the p ersonalit y board are
provided in the
Pre-instal lation Manual
.
Warning
Keep hands clear of the SWM, hinge, and wafer prober when lowering the SWM
into position on your wafer prober.
Caution
Do not touch the measurement pins of the SWM or the printed patterns
on the p ersonality b oard. Oil, p erspiration and dirt prevent go o d electrical
contact, deteriorate insulation, and degrade measurement accuracy.
Note
After you have installed the HP 16377A/B Personality Board on the wafer
prober, adjust the p osition of the p ersonality b oard so the pin b oard n
umbers
printed on the p ersonality b oard line up with the corresp onding n
umbers on
the SWM. Conrm that all the SWM measurement pins are making go o d
electrical contact with the pin contacts of the p ersonality b oard.
Manual and Small Automatic Wafer Probers
Because the SWM cannot b e installed directly on the man
ual wafer prob ers or small
automatic wafer probers, you need the HP 16378B Extension Cable Fixture to connect the
SWM to the manipulator or prob e card of the prober.
The extension cable xture installs onto the SWM, and secures by pushing the right and
left side levers down, similar to the HP 16370A Test Fixture Adapter. Wires from the
manipulator or the probe card of the prob er can then b e soldered to the measuremen
t pins of
the extension cable xture.
Refer to the HP 16378B
Operating Note
for more information on the extension cable xture.
Warning
Potentially hazardous voltages may be present at the measurement pins of the
extension cable fixture when the SWM output enabled lamp is lit. Mak
e sure the
protectivecover of the cable fixture is installed before y
ou operate the system.
Caution
Do not touch the measurement pins of the SWM or the extension cable
xture. Oil, perspiration, and dirt prevent go o d electrical contact and degrade
measurement accuracy.
3-10 Switching Matrix Installation
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