3.11 Commission the dry pumping system
WARNING:
During some applicaon cycles, the dry pumping system may exceed the OSHA
1910.95 Occupaonal Noise Exposure Limits, the EU noise direcve 2003/10/EC or
other regional noise limits dependent upon the process, duty cycle, installaon or
environment in which the dry pumping system is being operated. A sound pressure
survey must be conducted aer installaon. If necessary, the controls must be
implemented to ensure that the relevant limits are not exceeded during the
operaon and that adequate precauons are taken to prevent the person from
exposure to the high noise levels during the operaon.
1.
Switch on the external electrical supply and check that the power LEDs (Figure:
Front panel controls, item 7 and Figure: The controls/connectors on the rear of the
pump (system with rear exhaust and castors/levelling feet ed), item 4) goes on.
If the LEDs do not go on, contact us.
2.
Switch on the cooling water and purge gas supplies.
3.
Ensure that the exhaust extracon system is not blocked (for example, that valves
in the exhaust extracon system are open).
4. Ensure that all openings to atmospheric pressure in the foreline vacuum system
are closed.
5. Press and hold the local control buon (Figure: Front panel controls, item 5) and
check that the green local control LED (Figure: Front panel controls, item 6) comes
on and then remains connuously illuminated.
6. Press START buon (Figure: Front panel controls, item 3).
7. If the dry pumping system starts and connues to operate, connue at step 8. If a
warning or alarm condion is indicated:
▪
Shut down the dry pumping system. Refer to Manual shut down on page 59.
▪ Contact us.
8. Look at the pressure gauge in the inlet pipeline:
▪ If the pressure is increasing, immediately shut down the dry pumping system
and contact us.
▪
If the pressure is decreasing, connue to step 9.
9.
Visually check the purge gas dial pressure gauge on the rear of the pump to ensure
that the purge gas is being delivered to the pump. Connue to check the dial
pressure gauge regularly as the dry pumping system is used.
10.
Aer the dry pumping system is commissioned:
▪
To connue to operate the dry pumping system, refer to Start up on page 54.
▪
Otherwise, shut down the dry pumping system. Refer to Manual shut down on
page 59.
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M58800880_H - Installaon