Edwards GXS Series User Manual

Evacuang the chambers back‑lled with Argon
▪ For small chambers less than 2 m
3
(70 c) or if chamber pressure reaches 20 mbar
in under 2 minutes, the chamber evacuaon is short enough not to cause a
problem when pumping at full speed.
▪ For evacuang chambers between 2 m
3
(70 c) and 25 m
3
(885 c), the pump
speed should be set at 80 Hz unl the pressure is below 20 mbar.
▪ For evacuang chambers larger than 25 m
3
(885 c), contact us for more
informaon.
Note:
For prolonged operaon (greater than 45 minutes, above 20 mbar and/or the
chambers in excess of 25 m
3
(885 c)), an applicaon review must be done to
determine the actual requirement. Contact us for more informaon.
Sha seal purge
Nitrogen or the Clean Dry Air (CDA) purge is preferred as it gives a maximum headroom
on the crical clearances. Argon can be used as sha seal purge at 80 Hz and 110 Hz,
following the above guidelines for connuous operaon and pump down of chambers.
4.5 Manual shut down
WARNING:
If the dry pumping system is shut down and not isolated from the electrical supply,
do not disconnect the PDT or release the control from the PDT or front panel. This
may result in the dry pumping system being started by another module.
WARNING:
Do not remove the inlet connecons unl the pump has been allowed to stop
rotang and the power has been isolated. The pump can take up to three minutes to
completely stop.
CAUTION:
If the pump is stopped without the gas purge cycle on processes that have
condensable or solid by‑products then the pump may not restart.
CAUTION:
For applicaons pumping liquids or condensible gases: If the pump is switched o
straight aer the process then the liquids may remain trapped in the pump. These
liquids can corrode the pump mechanism while the dry pumping system is switched
o for extended periods and may prevent the pump from starng again. For these
applicaons, we recommend carrying out a Smart Stop with Stop Time set to the
maximum 3600 seconds. Once the pump has stopped, seal the inlet and exhaust to
prevent migraon of liquid/condensable back into the pump mechanism.
The dry pumping system has two manual shut down modes: Fast and Auto.
Page 59
M58800880_H - Operaon

Edwards GXS Series Specifications

General

Brand	Edwards
Model	GXS Series
Category	Water Pump
Language	English