Part 1: Setup & Operation 11. Clean Model
67
11.5 Additional specifications
For standard specifications, refer to chapter 10. Specifications in Part 1.
Model ES***C EL***C
Max. motion range of Joint #3
Value in ( ) is option
150mm (300mm) 300mm
Cleanliness level
Maximum of 10 particles (0.13 µm or more in diameter)
in 28317 cm
3
(1cft) sample-air located near the center of
the work area.
Exhaust tube
Outer diameter φ 12 mm (inner diameter φ 8 mm) or the
polyethylene tube with inner diameter φ 16 mm or over
Recommended exhaust flow rate Approximately 1000cm
3
/s (Normal)
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