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STP-iXA4507 Series
Edwards STP-iXA4507 Series User Manual
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Copyright
20
23 Edwards Japan
Limited. A
ll rights reserved.
For more information, contact the nearest Service Office
.
(
http://www.edwardsvacuum.com/
)
Manufacturer:
Edwards Japan Limite
d
1078
-1, Yoshi
hashi, Yachiyo
-shi, Chiba 276-85
23 JAPAN
Telephone:
Domestic
047
-
45
8-
8836
International
+
81-
47
-458-
88
36
Facsimile:
Domestic
047
-458-8835
International
+
81-
47
-458-
88
35
162
Table of Contents
Table of Contents
5
Introduction
11
Scope and Definitions
11
Electromagnetic Compatibility
12
Limited Warranty
12
Item Warranted
12
Disclaimer
13
Spare Parts
13
Precautions for Safe Operation of the STP Pump
14
Usable Gases
14
Maintenance and Inspection Precautions
15
Labels
15
Warning Label of STP Pump Installation and Caution Label for Heavy Product
15
Caution Label of Heater Removing Prohibition and Warning Label for Hot Surface
16
Caution Label for the High Voltage Devices
16
Label for the Rotational Direction
16
Notice Label Urging to Use Water-Cooling
17
Label Related to Connecting the Water-Cooling Lines
17
Warning Label of Urging Overhaul the Pump
17
Operation Principle of the STP Pump
18
STP Pump Specification
20
Technical Data
23
STP Pump Specifications
23
Maximum Gas Flow-Rate
25
STP-Ixa4507C/CV/Cv3
25
Maximum Gas Flow-Rate (STP-Ixa4507C)
25
Maximum Gas Flow-Rate (STP-Ixa4507Cv)
25
Maximum Gas Flow-Rate (STP-Ixa4507Cv3)
25
STP-Ixa4507B/Bv/Bv3
26
Maximum Gas Flow-Rate (STP-Ixa4507B)
26
Maximum Gas Flow-Rate (STP-Ixa4507Bv)
26
Maximum Gas Flow-Rate (STP-Ixa4507Bv3)
26
Water Cooling Use Condition
27
Control Unit
28
External Appearance of the STP Pump
29
External Appearance of STP-Ixa4507 Series
29
Label Affixing Positions
30
Installation of the Stp Pump
31
Precautions before Installation
31
Operating Environment
31
Installation Area
33
Space Around the STP Pump
33
Bench
34
Insulation Test
34
Unpacking
35
Unpacking the STP Pump
35
Name and Function of each Part
38
Name and Function of the Pump
38
Configuration of the STP Pump
38
Control Unit (Front Panel)
38
Pump Functions
38
Name and Function of the Control Unit
39
Control Unit Front Panel Functions
40
How to Install the STP Pump
41
Installation of the STP Pump to the Vacuum Equipment
41
Cleaning the Seal
42
STP Pump Installation Positions
43
Positions of the Outlet Port on the Horizontally
43
Secure the STP Pump
44
Destructive Torque and Recommended Securing Bolt for Inlet Port Flange
45
Screw Holes for Securing the Base of the Control Unit
47
Screw Holes for Securing the Control Unit Base
47
Power Cables
48
Power Cable
48
How to Connect the Power Cable
50
Precautions for Vacuum Piping
51
Vacuum Piping Method
51
Connecting the Purge Port
52
Connecting the Water Cooling Pipes
53
Positions of the Cooling Water Port
53
Attaching a Baking Heater
54
TMS Unit
55
TMS Unit Specification
55
TMS Heater
56
Connecting the TMS Heater Cable
56
TMS Valve
56
Configuration of the STP Pump with the TMS
57
Connecting the Pump and TMS Valve
58
Connecting to Semiconductor Equipment
59
3.10.1 Connecting to Power
59
Emergency off Circuit (EMO Circuit)
59
Operation
61
Gas Pumping, Cooling and Baking of the STP Pump
61
Gas Pumping
61
How to Introduce a Purge Gas
62
Cooling the STP Pump
62
Water-Cooling Method
62
Baking the STP Pump
63
Before Starting the STP Pump
64
Example of Cable Installation in Metallic Duct
64
Confirmation before Starting
65
Confirmation of Vacuum System
65
Powering ON/OFF
66
Powering on
66
Powering off
66
Pump Operation
66
Input Operation Port Setting
66
X5 STP-LINK Socket
66
Status" Led
67
Second Speed Option
68
Second Speed Function
68
Operating the TMS Unit (for Use with the TMS Unit)
69
Before Starting
69
Starting/Stopping
69
Setting the TMS Unit Function
69
Serial Communication Protocol
71
Introduction
71
Serial Port
71
Connection and Setting up
72
Signal Connection
72
X2 Pin Assign
72
Connecting the RS485
73
Communication Parameter Setting
74
Input Operation Port Setting
74
Communication Parameters
74
Input Operation Port
74
Serial Communication Timeout Setting
75
Serial Communication Time out Setting
75
Recommended Items about Communication Cable Installation
76
Grounding Example (both Ends Grounding)
76
Grounding Example (Single-Point Grounding)
76
Example of Cable Installation in Metallic Duct
77
Protocol Specifications
79
General Description
79
Standard Transmission Frame
80
Control Command
80
(In the RS232/RS485 Single Point Connection)
80
Query Command
82
(In the RS232/RS485 Single Point Connection)
82
Transmission Data Format
83
Frame Control (Checksum)
83
Error Control
83
Transmission Frame in RS485 Multi-Point Connection
83
Control Command in RS485 Multi-Point Connection
85
5.3.10 Query Command in RS485 Multi-Point Connection
86
5.3.11 Broadcasting Command in RS485 Multi-Point Connection
87
Pump Operation Commands
87
5.3.12 Application Note
88
Example of Command Sending During Answer Data Reply
89
Example of the Communication Cycle Process
90
Example of the Command Sending Process
91
Command Specifications
92
Command List
92
Readmeas
93
Command
93
Readfailmess
94
Pump Operation Commands
94
Error Message Values
96
Error Message Values (Continued)
97
Readmodfonct
98
Pump Operation Mode
98
Readversion
100
Readcounters
101
Readsetpoint
102
Readmotortemp
102
5.4.10 Readstatus
103
5.4.11 Readevents
104
Remote Mode
104
5.4.12 Setspeedsetpoint
105
5.4.13 Readspeedsetpoint
106
5.4.14 Readmodfonctwithwarning
107
5.4.15 Readmeasvalue
110
5.4.16 Readoptionfunc
112
5.4.17 Setoptionfunc
115
5.4.18 Readcondition
117
5.4.19 Readeventswithtime
119
5.4.20 Setoptions
124
Second Speed Function Setting
124
Option Function Number and Parameter List
124
Second Speed Selection
125
5.4.21 Readoptions
126
Second Speed Function Setting
126
Option Function Number and Parameter List
126
Second Speed Selection
127
TMS Temperature
128
Stp-Link and Display Unit
131
STP-Link
131
Display Unit
131
Safety Functions
133
Power Failure
133
STATUS LED and X4 REMOTE Output Signals at Power Failure
133
Operation after a Power Recovery
134
Abnormal State of Magnetic Bearing (Disturbance)
134
Excessive Vibration (Disturbance)
134
Motor Driver Overload (DRV Overload)
135
Overheating Inside the STP Pump (MOTOR Overheat)
135
Overheating Inside the Control Unit (CNT Overheat)
135
Overspeed
135
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
135
Safety Feature of the Rotor Blade Temperature Warning Sensor (Option)
136
WARNING" Function
137
WARNING Function
137
Contents of WARNING Function
138
First Damage Limit
138
Second Damage Limit
138
Pump Run Time over
138
Pump Overload
139
Imbalance
139
Other Warning
140
WARNING Function Setting
141
Default Setting of WARNING Function
141
Factory Setting and Variable Range
141
Troubleshooting Immediately after Failure Occurs
142
After Power Failure
142
After Other Abnormality/Error
142
Troubleshooting
143
Indication of "STATUS" LED (Red Flash)
143
Indication of "STATUS" LED (Green and Red Alternately)
151
No Indication of the "STATUS" LED (Red)
151
Troubleshooting with no Indication of the "STATUS" LED
151
Maintenance and Inspection
153
Cleaning
154
Inspecting the Deposit
154
Maintenance
156
Recommended Overhaul Intervals
156
Standard Replacement Parts
156
Recommended Maintenance Intervals for Main Parts
157
Transporting for Repair or Overhaul
158
Storage and Disposal
159
Storage of the STP Pump
159
Disposal
159
Service, Spares and Accessories
161
Introduction
161
Service
161
Spares
161
Accessories
162
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Edwards STP-iXA4507 Series Specifications
General
Brand
Edwards
Model
STP-iXA4507 Series
Category
Water Pump
Language
English
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