Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 48
INSTALLATION OF THE STP PUMP
PAG
E
48
3
3.9.6 Connecting the pump and TMS valve
The control unit is always water-cooled. For Three-way valve type [A-2], [B-2] and Two-way valve
type [C] in Figure 28, two water supply lines are required.
Connect the pump and TMS valve according to Figure 28.
[A-1] Three-way valve A type
(One supplying system)
[A-2] Three-way valve A type
(Two supplying system)
[B-1] Three-way valve B type
(One supplying system)
[B-2] Three-way valve B type
(Two supplying system)
[C] Two-way valve type
Figure 28 - TMS valve connection
Use cooling water that fulfils the conditions in Section 2.2.3, “Water cooling use condition”.
Note: The cooling water pipes are not included in the pump, so prepare and connect it with the
electromagnetic cooling water valve by yourself.

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English