Edwards STP-iXA4507 Series - Technical Data; STP Pump Specifications

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 13
TECHNICAL DATA
2
2 TECHNICAL DATA
2.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item
STP-iXA4507C/CV/CV3/B/BV/BV3
Flange size
Inlet port flange
VG300
ISO320F
VG350
VG400
Outlet port
Flange: KF50, Pipe: 52.2mm (ID)
Purge port
KF10
Pumping speed
*1
N
2
L/s
3,900
4,100
4,600
Ar
L/s
3,400
3,600
4,000
H
2
L/s
1,800
1,800
1,800
Compression ratio
*1
N
2,
Ar
>10
8
H
2
1.0×10
3
Ultimate pressure
*1
Pa (Torr)
10
-7
(10
-9
) [after baking]
Maximum backing pressure
*1,2
Pa (Torr)
266 (2.0)
Critical operating backing pressure
*1,*3
Pa (Torr)
320 (2.4)
Flow rate of purge gas <N
2
>
*4,5
Pa·m
3
/s(SCCM)
8.4×10
-2
±1.7×10
-2
(50±10)
Rated speed
rpm
24,240
Backup rotational speed
*6
rpm
Approximately 5,000
Starting time
min
≦11
Stopping time
min
≦16
Noise
dB
<55 (at 24,240 rpm)
Temperature Management System (TMS)
Available
Baking temperature
°C
<120 (Do not use baking heater with TMS unit)
Rotor blade
temperature warning
sensor
*7
Accuracy
*8
°C
±3
Safety feature
*9
Can be enabled when option is applied
Lubricating oil
Not necessary
Installation position
Free
Cooling method
Water cooling
Mass
*10
kg
111
111
104
111
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
-25 to 55
*1 Pumping speed, compression ratio, ultimate pressure and backing pressures are measured by Edwards Japan method.
(Ultimate pressure is a value after baking.)