Edwards STP-iXA4507 Series - Water Cooling Use Condition

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 17
TECHNICAL DATA
2
2.2.3 Water cooling use condition
Use cooling water that fulfills the following conditions.
Item
Specification
Port type
Pump unit
9/16-18UNF
Control unit
1/4”Tube fitting
(Swagelok)
Flow rate
L/min
2.8 to 3.2
Water temperature
°C
15 to 25
*1
Water pressure
MPa (kgf/cm
2
)
Max 0.3 (Max 3)
Maximum grain size
mm
2
0.03
pH
6.5 to 8.0
Water hardness
mg/L
100
Resistivity
kΩ･cm
4 to 1,000
Turbidity
FNU
<30
*1 Maximum gas flow rate differs according to the cooling water temperature.
Refer to section 2.2.