Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 28
INSTALLATION OF THE STP PUMP
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3
3.3 Name and function of each part
3.3.1 Name and function of the pump
The STP pump in Figure 15 is a typical pump model. Refer to Section 2, "TECHNICAL DATA".
Figure 15 - Configuration of the STP pump
Item
Description
Function
1
Inlet port flange
Connect to the vacuum equipment (at the high vacuum side).
2
Outlet port flange
Connect to the inlet port side of the backing pump.
3
Purge port
It is a port for introducing a purge gas.
Introduce a purge gas from this port to protect the inside of the
STP pump when pumping reactive or corrosive gas, including
hydrogen.
4
Cooling water port
(control unit side)
Connect to the STP pump cooling water pipe.
5
Cooling water port
(pump side)
Connect to the STP pump cooling water pipe.
6
Control unit
The electronics circuits are embedded to control the pump. Refer
to Section 3.3.2, "Name and function of the control unit, for details.
Table 9 - Pump functions

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English