Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 45
INSTALLATION OF THE STP PUMP
3
3.9 TMS unit
WARNING
The STP pump runs at high temperatures while the Temperature Management
System (TMS) unit works. NEVER touch or remove the heater cover. It causes
electric shock or burns. NEVER touch the STP pump and its peripheral equipment
while TMS unit is in operation. The operators can burn their hands.
The Temperature Management System (TMS) maintains the temperature of the STP pump
constantly by monitoring the temperature with the temperature sensor in the base part of the STP
pump and performing the TMS valve and TMS heater ON/OFF control.
The control unit is always water-cooled. Connect the pump and TMS valve according to Figure 28.
CAUTION
DO NOT install the TMS unit in places with high temperature, humidity, noise, vibration, or
unstable environment.
CAUTION
DO NOT apply force to the cables during installation, and DO NOT place heavy objects on the
cables or bend them excessively.
3.9.1 TMS unit specification
Item
Specification
Temperature control method
Control ON/OFF of the TMS heater and cooling water
Pre-set temperature *
1
°C
CV / BV: 66
CV3 / BV3: 81
Failure output
Failures are output from the STP control unit
TMS valve voltage
DCV
24
*1 The pre-set temperature of the TMS unit and the TMS temperature described in 2.2.1 to 2.2.2 are different. The TMS
temperatures listed in 2.2.1 to 2.2.2 are representative values for the pump flow path.
Table 14 - TMS unit specification

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English