3.10 Connecting to semiconductor equipment
The STP pump becomes a component system when installed on semiconductor equipment.
Consider the following when designing semiconductor equipment.
3.10.1 Connecting to power
The STP pump must be connected to the main power of the semiconductor equipment electrical
distribution system with a circuit breaker (Rated current 15 A).
Electrical energy isolation (Lockout/Tagout) must be made by the semiconductor equipment's main
disconnect device or circuit breaker.
Provide the equipment with the main disconnect devices or circuit breaker with more than 10,000
Arms
symmetrical amperes interrupting capacity (AIC).
3.10.2 Emergency off circuit (EMO circuit)
Ensure the power of the STP pump will be shut off by EMO circuit of the equipment.
When the power is shut off, the STP pump performs the same as a power failure. (After backup
operation during a power failure, the rotor lands on the touch down bearing)
Consider the following when designing the EMO circuit.
CAUTION
Ensure the atmosphere does not flow into the pump when the EMO circuit works (example: shut the
valve). The touch down bearing can be damaged, and the STP pump does not work properly if the
atmosphere flows into the STP pump.
CAUTION
The STP pump rotates for a while after the EMO circuit shuts off the power. Therefore, do a
recovery operation after the STP pump has stopped completely.
CAUTION
Stop the STP pump to prevent damage to the touch down bearing before the operation check of the
EMO circuit with regular maintenance.
Note: Prepare the main disconnect device and the EMO circuit by yourself.
Use the main disconnect device, which is lockable only in the de-energised position.
Locate the main disconnect device and the EMO button in a place where personnel are
readily accessible and are not exposed to any hazards during the operation.
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