Edwards STP-iXA4507 Series - Connecting the Water Cooling Pipes; Positions of the Cooling Water Port

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 43
INSTALLATION OF THE STP PUMP
3
3.7 Connecting the water cooling pipes
Secure the water cooling pipes to prevent water leakage and use cooling water under the conditions
provided in Section 2.2.3, "Water cooling use condition". It is recommended to connect the water
cooling pipes according to the direction (IN side / OUT side) in Figure 25. Install a container for
leaking water or a water leak detector where cooling water may leak (e.g. cooling water ports). Figure
25 shows the position of the cooling water ports.
Install the valve to isolate (Lockout / Tagout) cooling water at your company.
Note: Secure the connection pipe, and cool the STP pump.
Insufficient cooling of the pump can cause the surface of the pump to be hot. Running the
pump continuously without cooling can cause a failure and stop.
Figure 25 - Positions of the cooling water port
IN or OUT
(pump unit side)
IN or OUT
(control unit side)
IN or OUT
(control unit side)
IN or OUT
(pump unit side)