Edwards STP-iXA4507 Series - Gas Flow Rates and Cooling Conditions

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 15
TECHNICAL DATA
2
2.2 Maximum gas flow-rate
2.2.1 STP-iXA4507C/CV/CV3
Gas
Cooling water
condition
Purge gas N
2
flow rate
Maximum gas flow-rate
*1
Backing
pressure
[Pa(Torr)]
Backing
pump
[L/min]
TMS
[℃]
[Pa･m
3
/s]
[SCCM]
Ar
Temperature:
15 to 25 ºC
Flow rate:
2.8 to 3.2 L/min
Pressure:
Max 0.3 MPa
(Max 3 kgf/cm
2
)
8.4×10
-2
±1.7×10
-2
Pa•m
3
/s
(50±10 SCCM)
4.90
2,900
292
(2.187)
>1,300
N/A
(No heater)
6.59
3,900
140
(1.052)
>10,000
N
2
5.07
3,000
289
(2.167)
>1,300
8.45
5,000
148
(1.108)
>10,000
Table 1 - Maximum gas flow-rate (STP-iXA4507C)
Gas
Cooling water
condition
Purge gas N
2
flow rate
Maximum gas flow-rate
*1
Backing
pressure
[Pa(Torr)]
Backing
pump
[L/min]
TMS
[℃]
[Pa･m
3
/s]
[SCCM]
Ar
Temperature:
15 to 25 ºC
Flow rate:
2.8 to 3.2 L/min
Pressure:
Max 0.3 MPa
(Max 3 kgf/cm
2
)
8.4×10
-2
±1.7×10
-2
Pa•m
3
/s
(50±10 SCCM)
3.04
1,800
187
(1.406)
>1,300
70℃
3.21
1,900
82
(0.614)
>10,000
N
2
4.90
2,900
280
(2.098)
>1,300
7.60
4,500
135
(1.016)
>10,000
Table 2 - Maximum gas flow-rate (STP-iXA4507CV)
Gas
Cooling water
condition
Purge gas N
2
flow rate
Maximum gas flow-rate
*1
Backing
pressure
[Pa(Torr)]
Backing
pump
[L/min]
TMS
[℃]
[Pa･m
3
/s]
[SCCM]
Ar
Temperature:
15 to 25 ºC
Flow rate:
2.8 to 3.2 L/min
Pressure:
Max 0.3 MPa
(Max 3 kgf/cm
2
)
8.4×10
-2
±1.7×10
-2
Pa•m
3
/s
(50±10 SCCM)
1.52
900
105
(0.785)
>1,300
85℃
1.52
900
49
(0.371)
>10,000
N
2
2.70
1,600
161
(1.211)
>1,300
3.38
2,000
73
(0.548)
>10,000
Table 3 - Maximum gas flow-rate (STP-iXA4507CV3)
*1 The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is exhausted continuously.