Edwards STP-iXA4507 Series - STP-Ixa4507 B;Bv;Bv3; Maximum Gas Flow-Rate (STP-Ixa4507 B); Maximum Gas Flow-Rate (STP-Ixa4507 Bv); Maximum Gas Flow-Rate (STP-Ixa4507 Bv3)

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 16
TECHNICAL DATA
PAG
E
16
2
2.2.2 STP-iXA4507B/BV/BV3
Gas
Cooling water
condition
Purge gas N
2
flow rate
Maximum gas flow-rate
*1
Backing
pressure
[Pa(Torr)]
Backing
pump
[L/min]
TMS
[℃]
[Pa･m
3
/s]
[SCCM]
Ar
Temperature:
15 to 25 ºC
Flow rate:
2.8 to 3.2 L/min
Pressure:
Max 0.3 MPa
(Max 3 kgf/cm
2
)
8.4×10
-2
±1.7×10
-2
Pa•m
3
/s
(50±10 SCCM)
4.90
2,900
292
(2.187)
>1,300
N/A
(No heater)
6.59
3,900
140
(1.052)
>10,000
N
2
5.07
3,000
289
(2.167)
>1,300
8.45
5,000
148
(1.108)
>10,000
Table 4 - Maximum gas flow-rate (STP-iXA4507B)
Gas
Cooling water
condition
Purge gas N
2
flow rate
Maximum gas flow-rate
*1
Backing
pressure
[Pa(Torr)]
Backing
pump
[L/min]
TMS
[℃]
[Pa･m
3
/s]
[SCCM]
Ar
Temperature:
15 to 25 ºC
Flow rate:
2.8 to 3.2 L/min
Pressure:
Max 0.3 MPa
(Max 3 kgf/cm
2
)
8.4×10
-2
±1.7×10
-2
Pa•m
3
/s
(50±10 SCCM)
4.05
2,400
244
(1.831)
>1,300
70℃
4.73
2,800
109
(0.815)
>10,000
N
2
4.90
2,900
280
(2.098)
>1,300
7.60
4,500
135
(1.016)
>10,000
Table 5 - Maximum gas flow-rate (STP-iXA4507BV)
Gas
Cooling water
condition
Purge gas N
2
flow rate
Maximum gas flow-rate
*1
Backing
pressure
[Pa(Torr)]
Backing
pump
[L/min]
TMS
[℃]
[Pa･m
3
/s]
[SCCM]
Ar
Temperature:
15 to 25 ºC
Flow rate:
2.8 to 3.2 L/min
Pressure:
Max 0.3 MPa
(Max 3 kgf/cm
2
)
8.4×10
-2
±1.7×10
-2
Pa•m
3
/s
(50±10 SCCM)
2.53
1,500
160
(1.202)
>1,300
85℃
2.87
1,700
76
(0.567)
>10,000
N
2
2.87
1,700
170
(1.276)
>1,300
3.55
2,100
76
(0.568)
>10,000
Table 6 - Maximum gas flow-rate (STP-iXA4507BV3)
*1 The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is exhausted continuously.