STP-iXA4507 series Turbomolecular Pump
MAINTENANCE AND INSPECTION
8.4.3 Recommended maintenance intervals for main parts
Internal components of the STP pump will be damaged from a gas load, heat, and corrosion when
used long-term. Deterioration or abrasion of the internal parts of the STP pump will cause
unexpected failures. When overhauling the STP pump, replacement of main parts is recommended.
Refer to the following list as recommended maintenance intervals for the main parts.
Recommended maintenance intervals
*1
When not using
corrosive gas
Rotor blades
(High radiation coating specification)
Motor, Magnetic bearing unit
Temperature sensor (vacuum side)
TMS heater
Outlet port heater
*1 Maintenance intervals of any parts may be shortened depending on the condition of use.
The costs of replacing parts that need to be replaced will charge to the customer if observed
deterioration or abrasion, even though a period is not exceeding the recommended maintenance
intervals.
When an overhaul of the STP pump is needed, contact our Service office.