STP-iXA4507 series Turbomolecular Pump
In the case of the I/O Remote interface, a failure signal also simultaneously outputs from the "X4
REMOTE" connector.
Note: "TMS Lower Temp" is not detected for a certain time when the STP pump starts.
The STP pump decelerates and stops when a TMS sensor cable fails. In this case, the heater and
the cooling water unit are switched OFF, and the "STATUS" LED flashes in red.
In the case of the I/O Remote interface, a failure signal also simultaneously outputs from the "X4
REMOTE" connector.
7.1.10 Safety feature of the rotor blade temperature warning sensor (Option)
CAUTION
If you continue to use the pump while RTMP Overheat occurs or RTMP Higher occurs frequently, it
may lead to serious failure such as rotor blade damage. This may be the cause of overloading the
pump, accumulation of products in the pump, deterioration or damage of parts, etc. Therefore,
please review the operating conditions of the pump or overhaul it as soon as possible.
In order for the rotor blade temperature warning sensor to function properly, be sure to observe the
purge gas flow rate described in "2.1 STP pump specifications".
Models equipped with a rotor blade temperature warning sensor and with an effective safety function
will detect a warning (RTMP Higher) or a failure (RTMP Overheat) when the rotor blade temperature
exceeds the set temperature, and will operate as follows.
Continuous operation possible
Flashing orange when the pump is in
levitation or rated operation
Flashing red regardless of pump
status.
For Type E (warning output, factory
setting), the PROG OUT signal is output.
The PROG OUT signal does not function
as a warning output except for Type E.
A FAILURE signal is output.
The warning will be cancelled when the
rotor blade temp falls below the automatic
cancellation temp.
After the pump is stopped, if the
temp of the rotor is below the
temp that can be released, it can
be released by reset signal
input.