STP-iXA4507 series Turbomolecular Pump
7.5 Troubleshooting immediately after failure occurs
The STP pump has safety functions for various abnormities/errors.
When abnormities/errors are detected, the "STATUS" LED flashes in red. In the case of the I/O
Remote interface, a failure signal also simultaneously outputs from the "X4 REMOTE" connector.
If an abnormality/error is found when using the STP pump, check it and take measures in
accordance with the following procedures. If there are no relevant trouble cases, or if the system
does not work correctly even after the measures have been taken, see Section 8.5.
7.5.1 After power failure
It is recommended to make a sequential control system to supply the power to the STP pump
immediately after a power recovery.
7.5.2 After other abnormality/error
WARNING
When disconnecting cables from the STP pump to troubleshoot and take the
necessary action, confirm that the STP pump has stopped, turn off the primary
power (switch the MAIN POWER to "OFF") and isolate (Lockout/Tagout) the
electrical energy source, water, gas and other energy sources from the vacuum
equipment. If you do not follow the above, it can cause an accidental rotation of the
STP pump, resulting in an accident, an electric shock, or damage to equipment.
Moreover, an accident caused by water leaks or gas leaks can occur.
CAUTION
If the "STATUS” LED does not change to green flash even though do RESET, confirm that the STP
pump has stopped, and turn OFF the primary power (Switch the switch "OFF"). Then turn ON the
primary power again (Switch the switch "ON").
1. After confirming the "STATUS" LED has one flash and the STP pump has stopped, remove the
probable cause of the abnormality.
When the "STATUS" LED flashes in red, follow the recommended actions given in Table 37 to
Table 43.
2. Perform the RESET operation to change the "STATUS" LED flashes in green.
3. Perform the START operation. Check if the STP pump operates correctly.
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