Edwards STP-iXA4507 Series - Page 150

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 140
SAFETY FUNCTIONS
PAG
E
140
7
Referred
Section
2.2.3 3.9.6
Table
43 - Error List
(continued)
Countermeasures
1. Connect the electromagnetic
cooling water valve correctly. Check the volume of water and water temperature.
2. Contact
our Service office.
1. Contact
our Service office.
2. Connect the cable securely.
3. Contact
our Service office.
4. When the TMS function
is
not in use, set the "TMS Option
" to "DISABLE"
with
display unit iDT
-002 or
STP-
Link.
Probable causes
1. Cooling failure of TMS
unit..
2. Failure of the TMS unit.
1. Disconnection of the TMS
sensor.
2. Disconnection of the
external
TMS connection
cable.
3. Failure of the
external
TMS connection cable.
4. Incorrect setting of the
TMS function.
Occurrence condition
TMS temperature control error (when the TMS unit detection temperature becomes lower than the setting value by 10
°C (18
ºF) or more.
Error is not
detected for a certain time after the STP pump starts.
)
TMS sensor is not connected when the state "TMS
Option
" is
"ENABLE"
.
Pump operation
Decelerat
e and stop
Decelerat
e and stop
Message
TMS Lower Temp
TMS Sensor Lost