CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3 Limited warranty 2
1.3.1 Item warranted 2
1.3.2 Disclaimer 3
1.3.3 Spare parts 3
1.4 Precautions for safe operation of the STP pump 4
1.4.1 Usable gases 4
1.5 Maintenance and inspection precautions 5
1.6 Labels 5
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2 TECHNICAL DATA 13
2.1 STP pump specifications 13
2.2 Maximum gas flow-rate 15
2.2.1 STP-iXA4507C/CV/CV3 15
2.2.2 STP-iXA4507B/BV/BV3 16
2.2.3 Water cooling use condition 17
2.3 Control unit 18
2.4 External appearance of the STP pump 19
2.5 Label affixing positions 20
3 INSTALLATION OF THE STP PUMP 21
3.1 Precautions before installation 21
3.1.1 Operating environment 21
3.1.2 Installation area 23
3.1.3 Bench 24
3.1.4 Insulation test 24
3.2 Unpacking 25
3.2.1 Unpacking the STP pump 25
3.3 Name and function of each part 28
3.3.1 Name and function of the pump 28
3.3.2 Name and function of the control unit 29
3.4 How to install the STP pump 31
3.4.1 Cleaning the seal 32
3.4.2 STP pump installation positions 33
3.4.3 Secure the STP pump 34
3.4.4 Screw holes for securing the base of the control unit 37
3.4.5 Power cables 38
3.4.6 How to connect the power cable 40
3.5 Precautions for vacuum piping 41
3.5.1 Vacuum piping method 41
3.6 Connecting the purge port 42
3.7 Connecting the water cooling pipes 43
3.8 Attaching a baking heater 44
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