CONTENTS (CONTINUED)
Section Title Page
3.9 TMS unit 45
3.9.1 TMS unit specification 45
3.9.2 TMS heater 46
3.9.3 Connecting the TMS heater cable 46
3.9.4 TMS valve 46
3.9.5 Configuration of the STP pump with the TMS 47
3.9.6 Connecting the pump and TMS valve 48
3.10 Connecting to semiconductor equipment 49
3.10.1 Connecting to power 49
3.10.2 Emergency off circuit (EMO circuit) 49
4 OPERATION 51
4.1 Gas pumping, cooling and baking of the STP pump 51
4.1.1 Gas pumping 51
4.1.2 How to introduce a purge gas 52
4.2 Cooling the STP pump 52
4.2.1 Water-cooling method 52
4.3 Baking the STP pump 53
4.4 Before starting the STP pump 54
4.4.1 Confirmation before starting 55
4.4.2 Confirmation of vacuum system 55
4.5 Powering ON/OFF 56
4.5.1 Powering ON 56
4.5.2 Powering OFF 56
4.6 Pump operation 56
4.6.1 Input operation port setting 56
4.6.2 X5 STP-LINK socket 56
4.7 "STATUS" LED 57
4.8 Second speed option 58
4.9 Operating the TMS unit (for use with the TMS unit) 59
4.9.1 Before starting 59
4.9.2 Starting/Stopping 59
4.9.3 Setting the TMS unit function 59
5 SERIAL COMMUNICATION PROTOCOL 61
5.1 Introduction 61
5.2 Connection and setting up 62
5.2.1 Signal connection 62
5.2.2 Connecting the RS485 63
5.2.3 Communication parameter setting 64
5.2.4 Input operation port setting 64
5.2.5 Serial communication timeout setting 65
5.2.6 Recommended items about communication cable installation 66
5.3 Protocol specifications 69
5.3.1 General description 69
5.3.2 Standard transmission frame 70
5.3.3 Control command
(in the RS232/RS485 single point connection) 70
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