Edwards STP-iXA4507 Series - TMS Temperature

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 118
SERIAL COMMUNICATION PROTOCOL
PAG
E
118
5
5.4.21.3 TMS temperature
Temperatures of input sensors and the heater/water valve output conditions of TMS can be read.
And also, motor temperature and measured rotational speed can be read.
Note: Valid only with TMS specification
Parameter
Item
Data format
Remark
1
Option function number
16-bits hexadecimal
coded ASCII
001B
hex
2
Measured temperature 1
(Unit: ºC)
8-bits hexadecimal
coded ASCII
Value shows from -32 ºC (-26 ºF) to
223 ºC (433 ºF)
DF
hex
= +223 ºC (433 ºF)
DE
hex
= +222 ºC (432 ºF)
:
01
hex
= +1 ºC (34 ºF)
00
hex
= +/-0 ºC (32 ºF)
FF
hex
= -1 ºC (30 ºF)
:
E1
hex
= -31 ºC (-24 ºF)
E0
hex
= -32 ºC (-26 ºF)
3
Measured temperature 2
(Unit: ºC)
8-bits hexadecimal
coded ASCII
4
Measured temperature 3
(Unit: ºC)
8-bits hexadecimal
coded ASCII
5
Measured temperature 4
(Unit: ºC)
8-bits hexadecimal
coded ASCII
6
Output device 1 condition
8-bits hexadecimal
coded ASCII
00
hex
: Heater OFF/Valve Close
Others : Heater ON/Valve Open
7
Output device 2 condition
8-bits hexadecimal
coded ASCII
8
Output device 3 condition
8-bits hexadecimal
coded ASCII
9
Output device 4 condition
8-bits hexadecimal
coded ASCII
10
Motor temperature
(Unit: ºC)
16-bits hexadecimal
coded ASCII
11
[System reservation]
8-bits hexadecimal
coded ASCII
12
Motor current
(Unit: 0.1 A)
8-bits hexadecimal
coded ASCII
Value shows from 0.0 A to 25.5 A
13
[System reservation]
24-bits hexadecimal
coded ASCII
14
Measured rotational speed
(Unit: Hz)
16-bits hexadecimal
coded ASCII